{{$t('PAR-SPECTRA DIO-3000')}}
Designed for SEMI WET Process:
- {{$t('Remove particle defects')}}
- {{$t('Surface treatment')}}
- {{$t('Remove Photoresist Residue')}}
ODS (Ozone Delivery System) Applications:
- CVD TEOS/O3
- ALD High-K
PAR-SPECTRA {{$t('Ozoned products related service in Semiconductor')}}
- {{$t('Other brand DIO3 & ODS system Service')}}
- {{$t('Other brand ozone generator repair/overhaul service')}}
- {{$t('Ozone destructor recycle/overhaul')}}
- {{$t('Sensor and monitor for ozone gas/DIO3 repair/calibration')}}